22-21 DETERMINAREA ELIPSOMETRICĂ A GROSIMII ŞI A CONSTANTELOR OPTICE ALE FILMELOR SUPERFICIALE OPTIC ABSORBANTE


The paper presents a graphical method for the simultaneous
determination of thickness and optical constants of a superficial, optically
absorbent film. The data used have been obtained by ellipsometrical
measurements of a superficial layer of uneven thickness at several points.
The thickness and optical constants are determined for PMMA films
deposited on a copper surface highly polished.
Cuvinte cheie: constante optice, elipsometrie, film superficial, metodă
grafică
Keywords: optical constants, ellipsometry, surface film, graphical
method

21 DETERMINAREA ELIPSOMETRICĂ A GROSIMII ŞI A