QUANTITATIVE ANALYIS OF XPS PHOTOELECTRON SPECTRA
The paper addresses some issues regarding the influence of main factors on intensity of XPS peaks, namely photoionization cross-section and inelastic mean free path (IMFP). Also is described the XPS PeakFit software commonly used for quantitative determinations of XPS photoelectron spectra.
Keywords: X-ray photoelectron spectroscopy, spectrum, peak intensity
Cuvinte cheie: spectroscopie de fotoelectroni cu raze X, spectru, intensitatea unui peak